The experimental conditions of fast-flow glow discharge ion source to analyze the trace elements in superalloy were optimized in details. Based on comprehensively investigation on mass spectrometry interferences due to the most complex matrix elements in nickel superalloy，the analytical isotopes and appropriate mass spectrometry resolution for analyze the trace rare earth & precious metal elements were adopted. Relative sensitivity factors calibration scheme，which was calibrated in matched matrix by the homemade wrought superalloy reference material series of gradient content，has been established. Thus the relative error of analysis results was optimized from 4.0%-80% to 7.7%-20%. In addition，the reliable guarantee for metrological traceability of trace analysis has been achieved. The glow discharge mass spectrometry（GDMS） method for determining rare earth elements and precious metal elements in nickel base superalloy has been developed with detection limit in 0.001 0-0.015 μg/g，and quantitative limit in 0.003 0-0.045 μg/g. The established method was applied to analyze rare earth elements and precious metal elements in actual samples of wrought or cast superalloy，the measurement results are in good agreement with the reference values of wet analysis，which verifies the advantages fast treating solid samples by glow discharge，and the characteristics of high resolution mass spectrometry with low detection limit，wide linear range，and multiple elements analytical ability. It also shows great application prospects in the quality control of superalloy materials.