Tip wear of atomic force microscope(AFM) is a crucial factor to influence AFM image quality.In order to investigate the tip wear of AFM,the ultra flat glass surface with a roughness(Rq) lower than 05 nm was selected as the scanning sample,which was used for the efficiency assessment of tip wear.Under the test conditions，such as low target amplitude ratio(10%) for probe cantilever,low set point amplitude ratio(10%),low scanning speed(10 Hz) and moderate I-gain(17),the tip wear of the probe was minimal,which could effectively extend the service life of the probe.Furthermore,the mechanism for tip fracture and wear in the test process was speculated by comparing the morphologies of the probe tip of scanning electron microscope(SEM) in different test situations.