Preparation and Validation of Paper-based Microfluidic Chips Based on Maskless Lithography

ZHANG Yan; PIAO Lin-hua; TONG Jia-cheng; MA Xuan-lin; LIU Jun-yu

doi:10.19969/j.fxcsxb.23041802

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Preparation and Validation of Paper-based Microfluidic Chips Based on Maskless Lithography

Experimental Techniques and Methods | 更新时间：2023-09-19

- Preparation and Validation of Paper-based Microfluidic Chips Based on Maskless Lithography
- Journal of Instrumental Analysis Vol. 42, Issue 9, Pages: 1163-1167(2023)
- 作者机构：
  
  北京信息科技大学北京传感器重点实验室，北京 100101
- 作者简介：
- 基金信息：
- DOI：10.19969/j.fxcsxb.23041802
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张严,朴林华,佟嘉程等.基于无掩膜光刻法的纸基微流控芯片制备与验证研究[J].分析测试学报,2023,42(09):1163-1167.

ZHANG Yan,PIAO Lin-hua,TONG Jia-cheng,et al.Preparation and Validation of Paper-based Microfluidic Chips Based on Maskless Lithography[J].Journal of Instrumental Analysis,2023,42(09):1163-1167.
张严,朴林华,佟嘉程等.基于无掩膜光刻法的纸基微流控芯片制备与验证研究[J].分析测试学报,2023,42(09):1163-1167. DOI： 10.19969/j.fxcsxb.23041802.

ZHANG Yan,PIAO Lin-hua,TONG Jia-cheng,et al.Preparation and Validation of Paper-based Microfluidic Chips Based on Maskless Lithography[J].Journal of Instrumental Analysis,2023,42(09):1163-1167. DOI： 10.19969/j.fxcsxb.23041802.

摘要

为了开发新的纸芯片制备技术制作高精度的纸基微流控芯片，该文提出了一种基于无掩膜光刻技术的新制备方法。以疏水图案的表面接触角和液体在微流控通道内的流动情况为评价标准，研究了曝光、显影等关键工艺对疏水区域疏水强度以及液体流动情况的影响。研究结果表明，仅需2 s曝光时间制备的纸芯片疏水区域的接触角可达100.56°，亲疏水区域具有明显的区分，最小可实现的亲水通道和疏水屏障分别为（68±5） μm和（104±9） μm。将纸基芯片用于亚硝酸盐的检测，溶液浓度与显色区颜色强度之间呈良好的相关性，线性方程为,Y,=3.450,X,+34.83，,r,2,=0.977 0。无掩模光刻法制备纸芯片无需制作掩膜版，减少了芯片制作的成本和时间，工艺简便，芯片精度高，为纸芯片制备和应用提供了有效手段。

Abstract

To develop a new paper chip preparation technology to produce high-precision paper-based microfluidic chips，this paper proposes a new preparation method based on maskless lithography. The effects of exposure and development on the hydrophobic strength and liquid flow in the hydrophobic region were investigated using the surface contact angle of the hydrophobic pattern and the liquid flow in the microfluidic channel as evaluation criterias. The results showed that the contact angle of the hydrophobic region of the paper chip prepared with an exposure time of only 2 s could reach to 100.56°，with a clear distinction between the hydrophilic and hydrophobic regions. The minimum achievable hydrophilic channel and hydrophobic barrier widths were（68±5） μm and（104±9） μm，respectively. The paper-based chip was used for the detection of nitrite，and there was a good correlation between concentration of the solution and color intensity in the color development zone，with a linear equation of ,Y,=3.450,X,+34.83 and ,r,2,=0.977 0. The preparation of paper chips based on maskless lithography without making a mask version greatly reduces the cost and time of chip fabrication，and shows a simple process and high chip accuracy，which could provide an effective means for the development，production，and application of paper chips.

关键词

无掩膜光刻纸基微流控微流控芯片亚硝酸盐检测

Keywords

maskless lithographypaper-based microfluidicsmicrofluidic chipsnitrite detection

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