A new radio frequency(RF) power supply was developed,which composed of the module of signal generating and amplifying,the module of amplitude adjusting and the module of power driving.The power supply is compact,small size,stable and low cost,and is divided into low-frequency part and high-frequency part to drive two radio frequency quadrupoles in home-made time-of-flight mass spectrometer.The tunable frequency range of RF power supply are 150-900 kHz in low-frequency and 1-2 MHz in high frequency,the adjustable range of peak to peak voltage Vp-p are 0-100 V in low-frequency and 0-1 400 V in high frequency.With the RF power supply described in this paper,the home-made time-of-flight mass spectrometer was used to test the samples.As a result,the ions with m/z of 50-1 200 could be stably measured,and a good linearity was obtained in the concentration range of 5.0×10-9-5.0×10-5 mol/L for samples.